GRAPHENE

Atomic Layer Deposition (ALD)

FLEXAL ATOMFAB Loading Load lock or Cassette Clusterable cassette Substrates As much as 200mm wafers dealing with and items on a provider plate Bubbled liquid & stable precursors As much as 8 plus water, ozone and gases Max precursor supply temperature 200ºC MFC managed gasoline traces with speedy supply system;  1) thermal gasoline precursors (e.g. NH3, O2) 2) plasma gases (e.g. O2, N2, H2) As much as 10 in externally mounted gasoline pod

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