FLEXAL ATOMFAB Loading Load lock or Cassette Clusterable cassette Substrates Up to 200mm wafers handling and pieces on a carrier plate Bubbled liquid & solid precursors Up to 8 plus water, ozone and gases Max precursor source temperature 200ºC MFC controlled gas lines with rapid delivery system;  1) thermal gas precursors (e.g. NH3, O2) 2)…